Stan, G. E., Botea, M., Boni, G. a., Pintilie, I. & Pintilie, L.
Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate.
Appl. Surf. Sci. 353, 1195–1202 (2015). DOI:
10.1016/j.apsusc.2015.07.059